| 摘要 |
PROBLEM TO BE SOLVED: To solve such a problem that in a conventional light deflector, a piezoelectric sensor, as a mirror angle-detecting sensor, is fixed to the side of a mirror, and consequently stress which disperses onto the mirror is comparatively large to cause deformation of the mirror, and, meanwhile, stress which disperses onto the piezoelectric sensor is comparatively small, and consequently the displacement quantity of the piezoelectric sensor is small, and the piezoelectric electromotive force of the piezoelectric sensor is small. SOLUTION: In a light deflector, a mirror 2 has a circular reflection surface and is located in the cavity part 1a of a supporting body 1. A pair of torsion bars 3, 4 supports the mirror 2 with its swinging possible. Piezoelectric actuators 5, 6 which act on the torsion bar 3 are provided, and piezoelectric actuators 7, 8 which act on the torsion bar 4 are provided. Half-ring-shaped piezoelectric sensors 9, 10 are connected, via slits, to the bases, on the mirror side, of the torsion bars 3, 4 on the external periphery side of the mirror 2. COPYRIGHT: (C)2011,JPO&INPIT |
