摘要 |
There are provided a method of doping impurities, a method of manufacturing a solar cell, and a solar cell. In the doping method, a diffusion protective pattern having at least one opening is formed on a substrate that contains a first area and a second area. A first dopant is doped in the first area by using a first mask to form a first doped pattern. A second dopant is doped in the second area by using a second mask to form a second doped pattern. The first dopant and the second dopant may be doped in neighboring first and second areas, respectively, without creating a short circuit by using the first mask, the second mask, and the diffusion protective pattern.
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