| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning material having high capability of removing fine foreign matter attached to an object to be cleaned such as an electronic part or the like, easy to be peeled because of decreased residue of a glue, and convenient to be used in the process of producing an electronic part or the like. SOLUTION: The cleaning material includes an urethane layer, wherein the surface of the urethane layer has surface roughness Ra of not less than 0.005μm and not more than 0.1μm on the surface and foreign matter adhering to an object to be cleaned is removed by bringing the object to be cleaned into plane-contact with the surface of the urethane layer. COPYRIGHT: (C)2011,JPO&INPIT
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