发明名称 DRY FILM PHOTORESIST
摘要 The present invention relates to a dry film photoresist. In detail, the dry film photoresist according to the present invention enables a process of exposure to light to be performed when a base film is removed, and prevents the adverse effects of exposure to light caused by a base film, to thereby improve resolution. Further, the dry film photoresist of the present invention is advantageous in that transparency may not be deteriorated by a resin protection layer or a developing velocity may not be lowered by the resin protection layer even when a process of exposure to light is performed in the presence of the resin protection layer, thus achieving a high resolution.
申请公布号 WO2011037438(A3) 申请公布日期 2011.08.04
申请号 WO2010KR06592 申请日期 2010.09.28
申请人 KOLON INDUSTRIES, INC.;SUK, SANG HOON;MOON, HEE WAN;BONG, DONG HUN;LEE, BYEONG IL;HAN, KOOK HYUN;JHO, SEUNG JE;CHOI, JONG OOK 发明人 SUK, SANG HOON;MOON, HEE WAN;BONG, DONG HUN;LEE, BYEONG IL;HAN, KOOK HYUN;JHO, SEUNG JE;CHOI, JONG OOK
分类号 G03F7/11;G03F7/075;G03F7/09 主分类号 G03F7/11
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