发明名称 POSITIVE PHOTOSENSITIVE RESIN COMPOSITION, METHOD FOR PRODUCING PATTERN CURED FILM, AND ELECTRONIC COMPONENT
摘要 <P>PROBLEM TO BE SOLVED: To provide a positive photosensitive resin composition which is reduced in exposure time and has high sensitivity. <P>SOLUTION: The positive photosensitive resin composition contains (a) a polymer having a phenolic hydroxyl group or carboxyl group, (b) an iodonium compound having two or more iodonium structures in one molecule, (c) a diazonaphthoquinone compound, and (d) a solvent. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011150138(A) 申请公布日期 2011.08.04
申请号 JP20100011353 申请日期 2010.01.21
申请人 HITACHI CHEMICAL DUPONT MICROSYSTEMS LTD 发明人 KOTANI SHINJI
分类号 G03F7/023;C08G73/22;G03F7/004;H01L21/027 主分类号 G03F7/023
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