发明名称 |
POSITIVE PHOTOSENSITIVE RESIN COMPOSITION, METHOD FOR PRODUCING PATTERN CURED FILM, AND ELECTRONIC COMPONENT |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a positive photosensitive resin composition which is reduced in exposure time and has high sensitivity. <P>SOLUTION: The positive photosensitive resin composition contains (a) a polymer having a phenolic hydroxyl group or carboxyl group, (b) an iodonium compound having two or more iodonium structures in one molecule, (c) a diazonaphthoquinone compound, and (d) a solvent. <P>COPYRIGHT: (C)2011,JPO&INPIT |
申请公布号 |
JP2011150138(A) |
申请公布日期 |
2011.08.04 |
申请号 |
JP20100011353 |
申请日期 |
2010.01.21 |
申请人 |
HITACHI CHEMICAL DUPONT MICROSYSTEMS LTD |
发明人 |
KOTANI SHINJI |
分类号 |
G03F7/023;C08G73/22;G03F7/004;H01L21/027 |
主分类号 |
G03F7/023 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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