CHARGED PARTICLE BEAM DEVICE AND METHOD OF TEACHING TRANSFER ROBOT

摘要

PROBLEM TO BE SOLVED: To provide a device that teaches a transfer robot to move without causing the transfer robot to collide against a chamber etc.

SOLUTION: The charged particle beam device is equipped with: the transfer robot 142 which has a robot hand 143 and disposes a substrate to be irradiated with a charged particle beam at the robot hand to transfer the substrate; a drawing chamber 103 into which the substrate is transferred by the transfer robot; a verification section 14 which inputs presumptive position coordinates of a presumptive position of the robot hand when a movement position of the transfer robot is taught, and verifies whether the robot hand interferes with the chamber when moved to the presumptive position coordinates; a robot controller 114 which moves the robot hand to the presumptive position coordinates when it is verified that there is no interference; and a registration section 16 which registers the presumptive position coordinates where no interference is verified as teaching coordinates.

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