APPARATUS AND METHOD FOR MEASURING CONCENTRATION LEVEL OF IMPURITY IN INPUT GAS STREAM, AND APPARATUS AND METHOD FOR MEASURING CONCENTRATION LEVEL OF OXYGEN IN INPUT GAS STREAM

摘要

PROBLEM TO BE SOLVED: To provide an apparatus and method for quantifying impurity in input gas stream.

SOLUTION: The device and method employ a catalyst to convert the impurity in the input gas stream 12 into detectable species in the output gas stream 30. After that, the concentration of the detectable species is then measured by a detector 26, thereby achieving high sensitivity in analyzing the impurity in the gas stream.

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