| 摘要 |
The present invention provides a gas distribution module, which is capable of directing a plurality of different gases and rendering the gases to be diffused evenly by the turning channels disposed within the module so that the gases can be distributed uniformly within the gas distribution module and thereby being delivered onto a substrate evenly. In addition, the present further provides a gas distribution scanning apparatus, which has a displacement driving unit coupled to the gas distribution module or a carrier supporting the substrate so that the gases can be delivered uniformly onto the substrate by means of the linear movement of the gas distribution module or the carrier.
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