发明名称 SUBSTRATE NEST WITH DRIP REMOVER
摘要 An apparatus for supporting a work piece is provided. The apparatus includes outer support rails having support slots for supporting the work piece, the outer support rails disposed on opposing sides of the apparatus between opposing end members of the apparatus. Inner support rails extend between the opposing end members of the apparatus. An inner surface of each of the inner support rails has vertically disposed extensions extending therefrom. The vertically disposed extensions are aligned in pairs along a length of the inner support rails. A moveable device is disposed between the pairs of vertically disposed extensions. The moveable device is buoyantly moveable so that as the work piece is lifted, the moveable device follows. A method for cleaning a work piece is also included.
申请公布号 WO2011094641(A2) 申请公布日期 2011.08.04
申请号 WO2011US23061 申请日期 2011.01.28
申请人 XYRATEX TECHNOLOGY LTD.;MILLER, KENNETH, C.;LIGUTOM, RITO;TREICHEL, HELMUTH;THORNE, FLINT 发明人 MILLER, KENNETH, C.;LIGUTOM, RITO;TREICHEL, HELMUTH;THORNE, FLINT
分类号 H01L21/673;H01L21/304;H01L21/677 主分类号 H01L21/673
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