| 摘要 |
A brush for cleaning a workpiece is provided. The brush includes a rigid core having first and second portions affixed to each other. The rigid core has an aperture defined around an axis of rotation of the rigid core. A fluid channel is defined between opposing surfaces of the first and second portions. The fluid channel extends radially from a surface defining the aperture. First and second membranes are affixed to outer surfaces of the first and second portions, wherein movement of the first and second membranes is controlled through introduction of a fluid through the fluid channel. In one embodiment, the membrane is porous and the fluid is a cleaning fluid that contacts the workpiece, such as a magnetic disc or semiconductor substrate for cleaning. |
