LASER SCRIBE METHOD AND APPARATUS

摘要

PURPOSE: A laser scribing method and an apparatus thereof are provided to divide a single bundle of laser rays into a plurality of bundles of laser rays, thereby improving scanning speed when using the same power of single bundle of laser rays. CONSTITUTION: A plurality of beam spots is arranged in a scribe direction and formed with respect to work in a separated state. A scribe groove with a line shape is formed in the work by moving a plurality of beam spots to the scribe direction. A plurality of the beam spots is obtained from a single bunch of laser rays(LB1,LB2).