| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an apparatus and a method for feeding a high-pressure and high-purity nitrogen gas by a simple structure in a simple manner without causing an increase in apparatus size and cost. <P>SOLUTION: The high-pressure and high-purity nitrogen gas feeding apparatus 1 includes a gas feed line L1 provided with a pressure-swing adsorption nitrogen gas generation apparatus 2 which generates a high-purity nitrogen gas from air as a raw material, a pressure booster 3 which elevates the pressure of the nitrogen gas generated by the pressure swing adsorption nitrogen gas generation apparatus 2, a storage tank 4 which stores the nitrogen gas subjected to the pressure elevation by the pressure booster 3, and a valve 26 which reduces the pressure of the nitrogen gas stored in the storage tank 4, and the gas supply line L1 is provided with a return line L2 which returns the nitrogen gas from the outlet side 3b of the pressure booster 3 to its inlet side 3a. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
