| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a probe cleaning unit that selects only a probe assembly having a probe requiring cleaning and efficiently cleans the probe by easy operation. <P>SOLUTION: This probe cleaning unit includes an arm section movably attached to a probe unit of a panel inspection device between positions corresponding to at least the probe assemblies, a body section attached to the arm section, a moving base supported by the body section linearly reciprocatably, a means for linearly reciprocating the moving base with respect to the body section, and a distance adjusting mechanism for adjusting the distance between the arm section and the moving base so that a first cleaning means attached to the moving base comes into contact with the tips of a plurality of probes of the probe assemblies when the moving base is linearly reciprocated with respect to the body section. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
