| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and a method for scribe processing that are good in operability and economical. SOLUTION: The apparatus for scribe processing includes a holder of holding a workpiece, a scriber performing scribe processing on the workpiece held by the holder and including a scriber shank having a diamond chip arranged atop, a moving module of relatively moving the holder and the scriber, and a cooling jet ejection unit including a cooling jet ejection nozzle emitting a cooling jet to a processing point where the workpiece and diamond chip abut against each other. COPYRIGHT: (C)2011,JPO&INPIT |
