IMPRINTING MOLD RELEASE AGENT

摘要

PROBLEM TO BE SOLVED: To provide a mold release agent excellent in releasability and capable of suppressing the deterioration of a mold even if repeated pattern transfer is performed using the mold. SOLUTION: A compound having one or two functional groups chemically reacting with the material of the mold is used as the imprinting mold release agent. COPYRIGHT: (C)2011,JPO&INPIT