| 摘要 |
PROBLEM TO BE SOLVED: To satisfactorily keep micromotion characteristics without reducing the widths of connecting beams and to attain, when an impact force is applied, reduction of stress to a piezoelectric element and improvement of resonance frequency. SOLUTION: A right and left pair of connecting beams connecting a proximal end area and a distal end area on the suspension width-direction outward side of an opening area where at least parts of piezoelectric elements overlap comprise a proximal end side beam and a distal end side beam respectively. In each proximal end side beam, the length-direction center line is positioned to be closer to the suspension length-direction center line than a virtual line connecting the proximal end part of the length-direction center line of the proximal end side beam and the distal end part of the length-direction center line of the distal end side beam, and the length-direction center line is inclined so as to be closer to the suspension length-direction center line with the movement from the proximal end part to the distal end part. The distal end side beam is inclined with respect to the proximal end side beam so that the inclinationαof the length-direction center line of the distal end side beam with respect to the length-direction center line of the proximal end side beam is -42°or less. COPYRIGHT: (C)2011,JPO&INPIT
|
