发明名称 Isolation chamber and method of using the isolation chamber to make solar cell material
摘要 Apparatuses and methods are provided for the continuous formation of solar cell material including an isolation chamber that reduces cross contamination between adjacent formation zones that are at different pressures.
申请公布号 US2011189806(A1) 申请公布日期 2011.08.04
申请号 US20110931432 申请日期 2011.02.01
申请人 XUNLIGHT CORPORATION 发明人 CAO XINMIN;MOHRING BRADLEY S.
分类号 H01L31/18;H01L21/02 主分类号 H01L31/18
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