发明名称 |
Isolation chamber and method of using the isolation chamber to make solar cell material |
摘要 |
Apparatuses and methods are provided for the continuous formation of solar cell material including an isolation chamber that reduces cross contamination between adjacent formation zones that are at different pressures.
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申请公布号 |
US2011189806(A1) |
申请公布日期 |
2011.08.04 |
申请号 |
US20110931432 |
申请日期 |
2011.02.01 |
申请人 |
XUNLIGHT CORPORATION |
发明人 |
CAO XINMIN;MOHRING BRADLEY S. |
分类号 |
H01L31/18;H01L21/02 |
主分类号 |
H01L31/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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