发明名称 |
Electron microscope and specimen analyzing method |
摘要 |
An electron microscope includes: an electron beam column for irradiating a specimen with an electron beam; a specimen stage that supports the specimen; a scattered electron detector for detected backscattered electrons released from the specimen; and a focused ion beam column for irradiating the specimen with a focused ion beam.
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申请公布号 |
US2011186734(A1) |
申请公布日期 |
2011.08.04 |
申请号 |
US20110931411 |
申请日期 |
2011.01.28 |
申请人 |
HASUDA MASAKATSU;UEMOTO ATSUSHI;FUJII TOSHIAKI;TASHIRO JUNICHI |
发明人 |
HASUDA MASAKATSU;UEMOTO ATSUSHI;FUJII TOSHIAKI;TASHIRO JUNICHI |
分类号 |
G01N23/225;H01J37/28 |
主分类号 |
G01N23/225 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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