PROBE-CARD HAVING MEANS FOR CONTROLLING FLATNESS

摘要

PURPOSE: A probe card equipped with a flat controlling means is provided to control the deflection of a probe substrate and a space transformer in detail using a macroscopic flat controlling means and the geometrical transformation of the probe substrate and the space transformer using a localized flat controlling means. CONSTITUTION: A printed circuit board(108) outputs an electric signal by receiving an outside test signal. A probe substrate(102) equips a plurality of probes(101) to the contact surface with a semiconductor device. An upper reinforcing plate(109) is fixed on the top of a printed circuit board. A flow type reinforcement plate(110) is supported on the top of the upper reinforcing plate. One end of a plurality of a first flat controlling means(111) is combined to the probe substrate and another end is connected with the flow type reinforcement plate. The plurality of a first flat controlling means generates up and down movement of the probe substrate according to rotation controlling. One end of a plurality of a second flat controlling means is combined to the upper reinforcing plate and another end is connected to the flow type reinforcement plate. The plurality of a second flat controlling means controls the deflection of the flow type reinforcement plate according to rotation controlling.