| 摘要 |
PURPOSE: A device for inspecting indentation impression is provided to ensure high quality of indentation impression images by bringing a microscope into focus on an inspection surface when the microscope moves to an inspection position. CONSTITUTION: A device for inspecting indentation impression comprises an inspection table(10), an indentation-impression image creating unit(20), a motor control unit(60), a laser displacement sensor's light emitting unit(31), a laser displacement sensor's light receiving unit(32) and a main controller(40). The inspection table holds a target, TCP or COG and moves by a transfer motor, which is controlled by a control unit. The indentation-impression creating unit is arranged on the upper or lower part of the inspection table and objective lens is coupled to one end of a body tube. A DIC filter unit, an analyzer and a polarization filter unit coupled to a lighting unit are coupled to one side of the indentation-impression image creating unit. A focus adjusting support is arranged on the other side of the indentation-impression image creating unit.
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