| 摘要 |
There is provided a transfer apparatus 10 which transfers many chips C on a dicing tape DT stretched in a first ring frame 20 to a transfer sheet S stuck in a second ring frame 24. This transfer apparatus 10 is provided with a pressing member 15 which presses the transfer sheet S, and a moving device 16 which supports this pressing member 15. The pressing member 15 is subjected to movement control by the moving device 16 in such a manner that the pressing member 15 presses the transfer sheet S while moving in a circular pattern in a plane. |
