APPARATUS INCLUDING A PLASMA TORCH FOR PURIFYING A SEMICONDUCTOR MATERIAL,申请号EP20080867613-传众专利搜索

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发明名称	APPARATUS INCLUDING A PLASMA TORCH FOR PURIFYING A SEMICONDUCTOR MATERIAL
摘要
申请公布号	EP2231518(B1)	申请公布日期	2011.08.03
申请号	EP20080867613	申请日期	2008.12.24
申请人	EFD INDUCTION SA;COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES;CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE;FERROPEM	发明人	RIVAT, PASCAL;FLAHAUT, EMMANUEL;TRASSY, CHRISTIAN;COCCO, FRANCOIS;GROSSIER, ETIENNE
分类号	C30B29/06;C01B33/037;C01B33/02;C30B11/00	主分类号	C30B29/06
代理机构		代理人
主权项
地址

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