INLINE COMPUTED TOMOGRAPHY INSPECTION SYSTEM AND METHOD USING THE SAME

摘要

PURPOSE: Inline CT inspection system and method are provided to reduce inspection hours by partial scanning of a target and parallel processing of partial image data taken through the scanning by a plurality of cores in a parallel processing unit. CONSTITUTION: An inline CT inspection system comprises a CT unit(30), an image processing unit(95), a loading unit(10), an unloading unit(70) and a control unit(90). The CT unit takes CT images of a target, an electronic part, such as semiconductor. The image processing unit parallel-processes a plurality of partial image data taken by the CT unit, with a plurality of cores in a parallel processing unit. The image processing unit re-organizes the parallel-processed data as tomography images. The image processing unit corrects slope of the tomography image, compares the images with pre-stored standard images and determines quality of the target.