发明名称 |
APPARATUS AND METHOD FOR FORMING 3D NANOSTRUCTURE ELECTRODE FOR ELECTROCHEMICAL BATTERY OR CAPACITOR |
摘要 |
Embodiments described herein generally relate to an electrode structure for an electrochemical battery or capacitor, particularly, apparatus and methods of creating a reliable and cost efficient 3D electrode nano structure for an electrochemical battery or capacitor that has an improved lifetime, lower production costs, and improved process performance. |
申请公布号 |
EP2351138(A2) |
申请公布日期 |
2011.08.03 |
申请号 |
EP20090828243 |
申请日期 |
2009.11.19 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
LOPATIN, SERGEY;BACHRACH, ROBERT, Z. |
分类号 |
H01M10/04;C23C2/00;C23C2/14;H01G9/042;H01M10/0525 |
主分类号 |
H01M10/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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