发明名称 AMPULE FOR GROWING SINGLE CRYSTAL AND SINGLE CRYSTAL GROWING APPARATUS HAVING THE SAME
摘要 PURPOSE: An ample for a single crystal growth and an apparatus for single crystal growth including the same are provided to prevent the atomic ratio of a micro component from being changed by including a plurality of ample bodies forming continuous multi body type which is laminated each other. CONSTITUTION: A plurality of ample bodies(2) forms a continuous multi body type in which a sample(1) is stacked with multi layers to a single crystal growth direction. A same sample is arranged in a plurality of ample bodies. A plurality of ample bodies is formed with quartz. A single crystal sample is mounted in the ample, a heater(20) heats the ample. A driving unit(30) falls and lifts the ample or the heater to the single crystal growth direction. The ample is tacked in the plurality of ample bodies to the single crystal growth direction.
申请公布号 KR20110087411(A) 申请公布日期 2011.08.03
申请号 KR20100006814 申请日期 2010.01.26
申请人 KOREA ATOMIC ENERGY RESEARCH INSTITUTE 发明人 PARK, SE HWAN;LEE, JAE HYUNG;CHO, YUN HO;HA, JANG HO
分类号 C30B11/00;C30B29/06;H01L21/02 主分类号 C30B11/00
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