发明名称 TREATMENT METHOD USING PLASMA
摘要 <p>The invention is related to a treatment for a base material using plasma. Various particulate substances, porous substances, or film-state substances can be easily formed on the base material. Alternatively, a particulate substance, a porous substance, or a film-state substance, such as ceramic, can be formed even on a base material having low heat resistance. In a treatment method using plasma, in which the plasma is irradiated on a precursor substance 12 deposited on a surface of a base material 10 and a portion of the component materials of the precursor substance 12 is removed, the base material 10 is in particulate form, filamentous form, or three-dimensional form. The precursor substance 12 is liquid, gas, suspension, powder, or a solid applied to the base material. The precursor substance 12 is deposited on the base material 10 by coating, spraying, transfer, or printing.</p>
申请公布号 EP2351872(A1) 申请公布日期 2011.08.03
申请号 EP20090817921 申请日期 2009.10.05
申请人 TOKYO INSTITUTE OF TECHNOLOGY 发明人 MIYAHARA, HIDEKAZU;OKINO, AKITOSHI
分类号 C23C18/00;H01L21/3205;H05K3/08;H05K3/10 主分类号 C23C18/00
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