| 摘要 |
PURPOSE: A film type probe unit is provided to accurately apply a monitoring signal even in a case of making an electrode of monitored body with an ultra-fine pitch while preventing a short circuit. CONSTITUTION: A pattern wiring(422,423) is formed on an insulating film(421). A particular position of the pattern wiring touches with a monitored body in a contact part(422a,423a). More than two rows of the contact parts are formed in a probe sheet(420). The probe sheet is included in the lower surface of a body block. A section passing the space between other rows of the contact part among the pattern wiring is formed in the other side of a surface where the contact part is formed.
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