发明名称 |
PROCESS FOR PRODUCTION OF SYNTHETIC QUARTZ GLASS |
摘要 |
<p>The present invention relates to a process for production of a synthetic quartz glass having a fluorine concentration of 1,000 mass ppm or more, the process comprising: (a) a step of depositing and growing quartz glass fine particles obtained by flame hydrolysis of a glass forming raw material onto a substrate, to thereby form a porous glass body; (b) a step of keeping the porous glass body in a reaction vessel that is filled with elemental fluorine (F 2 ) or a mixed gas comprising elemental fluorine (F 2 ) diluted with an inert gas and contains a solid metal fluoride, to thereby obtain a fluorine-containing porous glass body; and (c) a step of heating the fluorine-containing porous glass body to a transparent vitrification temperature, to thereby obtain a fluorine-containing transparent glass body.</p> |
申请公布号 |
EP2351712(A1) |
申请公布日期 |
2011.08.03 |
申请号 |
EP20090819144 |
申请日期 |
2009.10.02 |
申请人 |
ASAHI GLASS COMPANY, LIMITED |
发明人 |
TAMITSUJI CHIKAYA;WATANABE KUNIO;KOIKE AKIO |
分类号 |
C03B8/04;C03B19/14;C03B20/00;C03C3/06;G03F1/00 |
主分类号 |
C03B8/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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