ATMOSPHERIC PRESSURE PLASMA GENERATOR

摘要

PURPOSE: A plasma generating apparatus under atmospheric pressure is provided to form plasma of uniform high density by reducing the probability of the occurrence of a streamer or arc. CONSTITUTION: A vent is formed in the lower part of a ground electrode(30). An insulating member(20) is combined between a housing(10) and the ground electrode. An RF electrode(40) forms a discharge space(45) between the ground electrodes. A power supply part(50) supplies the power source to the RF electrode. A cover member separates the RF electrode with the ground electrode.