A STAGE USING FLEXURE HINGE MODULE

摘要

PURPOSE: A stage using a flexible hinge module is provided to improve nano-precision by reducing thermal deformation errors. CONSTITUTION: A stage using a flexible hinge module comprises a stage(4), three flexure modules, piezoelectric drive units(1), a base frame(5), capacitor sensors(6), and a measurement unit. The stage measures a test piece. The flexure modules are connected to the stage. The piezoelectric drive units drive the flexure modules. The base frame is located at the bottom of the stage. The capacitor sensors are formed in the base frame and measure the movement of the stage. The measurement unit is composed of jigs(7) for fixing the sensor.