ATMOSPHERIC PLASMA EQUIPMENT AND WAVEGUIDE FOR THE SAME

摘要

PURPOSE: An atmospheric pressure plasma apparatus and a waveguide therefor are provided to achieve an effect which stably maintains generated plasma and a convergence effect which is applied through a waveguide having a height difference of more than 2. CONSTITUTION: An oscillator supplies electro-magnetic waves to a first high height part(210). A first tapered part(220) is connected with the end part of the first high height part. A second high height part(230) is connected with the end part of the first tapered part. A second tapered part(240) is connected with the end part of the second high height part. A low height part(250) is connected with the end part of the second tapered part.