ULTRA COOLING SEPARATION DEVICE OF MIXED GAS

摘要

PURPOSE: An ultra low temperature cooling separator of mixed gas is provided to remove the danger of TFE explosion by stably separating the mixed gas through a low temperature and low pressure cooling method. CONSTITUTION: An ultra low temperature cooling separator of mixed gas comprises: a distillation device(20) separating and discharging the supplied mixed gas through the distillation; a cooling device(10) providing an ultra low temperature secondary refrigerant; an ultra low temperature circulator(30) which circulates the secondary refrigerant to the distillation device through the centrifugal force of the cooling device.