发明名称 |
Technique for manufacturing a solar cell |
摘要 |
Techniques for manufacturing solar cells are disclosed. In one particular exemplary embodiment, the technique may comprise disposing a mask upstream of the solar cell, the mask comprising a plurality of filaments spaced apart from one another to define at least one aperture; directing a ribbon ion beam of desired species toward the solar cell to ion implant a portion of the solar cell defined by the at least one aperture of the mask; and orienting the ribbon ion beam such that longer cross-section dimension of the ribbon beam is perpendicular to the aperture in one plane. |
申请公布号 |
EP2351101(A2) |
申请公布日期 |
2011.08.03 |
申请号 |
EP20090830787 |
申请日期 |
2009.10.20 |
申请人 |
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES |
发明人 |
BLAKE, JULIAN, G.;DANIELS, KEVIN, M. |
分类号 |
H01J37/317;H01L21/266;H01L31/18 |
主分类号 |
H01J37/317 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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