发明名称 Technique for manufacturing a solar cell
摘要 Techniques for manufacturing solar cells are disclosed. In one particular exemplary embodiment, the technique may comprise disposing a mask upstream of the solar cell, the mask comprising a plurality of filaments spaced apart from one another to define at least one aperture; directing a ribbon ion beam of desired species toward the solar cell to ion implant a portion of the solar cell defined by the at least one aperture of the mask; and orienting the ribbon ion beam such that longer cross-section dimension of the ribbon beam is perpendicular to the aperture in one plane.
申请公布号 EP2351101(A2) 申请公布日期 2011.08.03
申请号 EP20090830787 申请日期 2009.10.20
申请人 VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES 发明人 BLAKE, JULIAN, G.;DANIELS, KEVIN, M.
分类号 H01J37/317;H01L21/266;H01L31/18 主分类号 H01J37/317
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