发明名称 Detecting and repairing defects of photovoltaic devices
摘要 An apparatus for both detecting and repairing a shunt defect in a solar cell substrate. A shunt detection module detects the shunt defect in the substrate, using at least one of lock-in thermography and current-voltage testing. A process diagnostic module determines whether the substrate should be passed without further processing by the apparatus, rejected without further processing by the apparatus, or repaired by the apparatus. A shunt repair module electrically isolates the shunt defect in the substrate. In this manner, a single apparatus can quickly check for shunts and make a determination as to whether the substrate is worth repairing. If it is worth repairing, then the apparatus can make the repairs to the substrate.
申请公布号 US7989729(B1) 申请公布日期 2011.08.02
申请号 US20080045724 申请日期 2008.03.11
申请人 KLA-TENCOR CORPORATION 发明人 ZHAO GUOHENG;ZAPALAC, JR. GEORGE H.;NGAI SAMUEL S. H.;LEVY ADY;VAEZ-IRAVANI MEHDI
分类号 G01J5/00;G06K9/00 主分类号 G01J5/00
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