发明名称 |
Tweezer-equipped scanning probe microscope and transfer method |
摘要 |
A tweezer-equipped scanning probe microscope comprises a first arm with a probing portion, a second arm that moves along an opening direction or a closing direction relative to the first arm, an electrostatic actuator that drives the second arm along the opening direction or the closing direction based upon an opening/closing drive voltage applied thereto, an amplifier that induces self-oscillation in the electrostatic actuator by using an electrically equivalent circuit accompanying the electrostatic actuator as a feedback circuit and causes the second arm to vibrate through the self-oscillation, and a vibration state detection unit that detects a change of vibration state of the second arm as the second arm contacts an object.
|
申请公布号 |
US7987703(B2) |
申请公布日期 |
2011.08.02 |
申请号 |
US20080130311 |
申请日期 |
2008.05.30 |
申请人 |
AOI ELECTRONICS CO., LTD.;SII NANO TECHNOLOGY INC. |
发明人 |
KONNO TAKASHI;YASUTAKE MASATOSHI |
分类号 |
G01B5/28;B25J7/00;B81B3/00;G01Q60/24;G01Q80/00 |
主分类号 |
G01B5/28 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|