| 摘要 |
PURPOSE: A method for manufacturing a plasma display panel filter and a DC sputtering device for the same are provided to prevent the formation of a separate oxide layer between a high refractive transparent layer and a metal layer because the conductivity of the corresponding metal layer does not degrade due to oxygen. CONSTITUTION: A DC sputtering device for a plasma display panel filter comprises a substrate holder, a back panel, shields(308a,308b), and a DC power supply unit(310). The substrate holder fixes a substrate(306). The back panel supports a specific target arranged facing the substrate. The shields are arranged outside the target and have recesses to prevent the shield from becoming non-conductive. The DC power supply unit applies voltage to the target(302) and the shields, and the DC power supply comprises a DC power supply(320) generating specific DC voltage and a division control part(322) changing the DC voltage into pulses and distributing the pulses. |
