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发明名称
METHOD FOR DETACHING AND REMOVING A SEMICONDUCTOR CHIP FROM A TAPE
摘要
申请公布号
KR20110086698(A)
申请公布日期
2011.07.29
申请号
KR20117010535
申请日期
2009.11.03
申请人
ESEC SA
发明人
BEHLER STEFAN
分类号
H01L21/677;H01L21/50;H01L21/68
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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