发明名称 |
COMPOSITE STAMPER FOR IMPRINT LITHOGRAPHY |
摘要 |
A STAMPER (200) HAVING A PATTERNED LAYER (210) COMPOSED OF A HARD MATERIAL AND A COMPRESSIBLE MATERIAL BACK PLANE LAYER (220). THE BACK PLANE LAYER (220) MAY BE COMPOSED OF AN ELASTOMER. THE STAMPER (200) MAY BE USED TO IMPRINT AN EMBOSSABLE LAYER (410) DISPOSED ABOVE A SUBSTRATE FOR THE PRODUCTION OF A MAGNETIC RECORDING DISK.
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申请公布号 |
MY144004(A) |
申请公布日期 |
2011.07.29 |
申请号 |
MYPI20044959 |
申请日期 |
2004.11.30 |
申请人 |
WD MEDIA, INC. |
发明人 |
ANDREW M. HOMOLA |
分类号 |
B29C43/32;G11B5/84;B29C33/38;B29C33/56;G03F7/00;G11B7/26;H01L21/027 |
主分类号 |
B29C43/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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