| 摘要 |
<P>PROBLEM TO BE SOLVED: To speedily assemble a substrate stage device. <P>SOLUTION: An X coarse motion stage 23X, Y coarse motion stage 23Y, weight cancel device 40, and body section 51 that are adjusted in relative position, in a manufacturing plant of the substrate stage device are transported as a stage unit 20 without disassembling, and are used for reassembling the substrate stage device in its transporting destination. since during reassembling, position adjustment is not required among the X coarse-motion stage, Y coarse-motion stage 23Y, weight cancel device 40, and body section 51, the substrate stage device can be assembled speedily. <P>COPYRIGHT: (C)2011,JPO&INPIT |
