| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To reduce a difference between a reference line and an actual cutting line by preventing the distance between a shaft of a spindle and a microscope from changing owing to heat. <P>SOLUTION: A mounting surface 46a of a Y-axis base 46 includes spindles 28A and 28B, provided with blades 28A and 28B atop, freely slidably in a Y direction and a Z direction through Y-axis tables 42A and 42B for blade and Z-axis tables 40A and 40B for blade. Further, the mounting surface 46a of the Y-axis base 46 includes a camera unit 50 freely slidably in the Y direction and Z direction through a Y-axis table 56 for camera and a Z-axis table 52 for camera. Consequently, the reference line and cutting position are prevented from shifting owing to thermal expansion etc. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
