发明名称 ELECTRONIC APPARATUS, AND METHOD OF MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide an electronic apparatus in which an electronic component bonded on a substrate is sealed by a cap body, and to provide a method of manufacturing the same. SOLUTION: At a circumferential edge of a ceramic substrate 10 on another principal surface side, in which a vibrating piece bonding terminal 18 is provided, a stage part 11 is formed in parallel with the other principal surface. A wall surface 12 of a step formed by the stage part 11 and another principal surface is provided perpendicularly to the stage part 11. Furthermore, a metal layer 13 is provided over the stage part 11 and the wall surface 12. A piezoelectric vibrating piece 20 is bonded to the vibrating piece bonding terminal 18 through a bonding member 39. Then, the metal layer 13, over the stage part 11 and the wall surface 12 of the ceramic substrate 10, and a cap body 19, on a lower surface side of an abutting leg part 19c and on the inside of a side wall part 19b closer to the abutting leg part 19c, are bonded through brazing filler metal 29, and the piezoelectric vibrating piece 20 is air-tightly sealed within a cavity T surrounded with the cap body 19 and a bonding surface of the piezoelectric vibrating piece 20 of the ceramic substrate 10. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011147054(A) 申请公布日期 2011.07.28
申请号 JP20100007862 申请日期 2010.01.18
申请人 SEIKO EPSON CORP 发明人 NAGANO YOJI
分类号 H03H9/02;H01L23/02;H01L23/04;H03H3/02 主分类号 H03H9/02
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