COAXIAL THROUGH-SILICON VIA

摘要

A through-silicon via (TSV) structure forming a unique coaxial or triaxial interconnect within the silicon substrate 40. The TSV structure is provided with two or more independent electrical conductors 50, 60 insulated from another and from the substrate. The electrical conductors can be connected to different voltages or ground, making it possible to operate the TSV structure as a coaxial or triaxial device. Multiple layers using various insulator materials can be used as insulator, wherein the layers are selected based on dielectric properties, fill properties, interfacial adhesion, CTE match, and the like. The TSV structure overcomes defects in the outer insulation layer that may lead to leakage. A method of fabricating such a TSV structure is also described.