OXIDE DEPOSITION MATERIAL, VAPOR DEPOSITED THIN FILM, AND SOLAR CELL

摘要

Disclosed are: an oxide tablet for vapor deposition (oxide deposition material); a vapor deposited thin film produced using the oxide tablet for vapor deposition; and a solar cell. The tablet is configured of a sintered body, which is not subjected to surface grinding after the sintering and contains indium oxide as a main component, while containing cerium. The tablet is characterized in that when the cerium content in the surface layer from the surface of the sintered body to the depth of 5 µm is represented by the ratio of the numbers of atoms Ce/In (CompS) and the average cerium content in the entire sintered body is represented by the ratio of the numbers of atoms Ce/In (CompA), CompS/CompA is 0.9-1.1.