FLUORINE GAS GENERATION DEVICE

摘要

Provided is a fluorine gas generation device which is provided with an emergency stop apparatus for operating at the time of emergency stop of the fluorine gas generation device. The emergency stop apparatus is provided with an alternative gas supply apparatus, an alternative entrained gas shutoff valve, and an emergency stop instrumentation gas supply apparatus. The alternative gas supply apparatus is capable of supplying a refrigerant of a refinery device as an alternative gas instead of an entrained gas which is shut off by closing an entrained gas shutoff valve along with a loss of a drive source caused by an emergency stop of the fluorine gas generation device. The alternative entrained gas shutoff valve performs switching between the supply of the alternative gas to a hydrogen fluoride supply channel and the shutoff thereof. The emergency stop instrumentation gas supply apparatus has an instrumentation gas shutoff valve capable of supplying the instrumentation gas by opening the valve along with the loss of the drive source caused by the emergency stop of the fluorine gas generation device. At the time of emergency stop of the fluorine gas generation device, in response to the supply of the instrumentation gas, the alternative entrained gas shutoff valve is opened, and the alternative gas is supplied to the hydrogen fluoride supply channel.