发明名称 ULTRASONIC CLEANING METHOD
摘要 <p>Disclosed is an ultrasonic cleaning method that, at the very least, cleans an object to be cleaned by immersing the aforementioned object to be cleaned in cleaning fluid that is within a cleaning tank and transmitting ultrasonic waves generated from an ultrasonic transducer to the cleaning fluid that is within the aforementioned cleaning tank, and is characterized by the cleaning of the object to be cleaned by means of the ultrasonic waves generated by the aforementioned ultrasonic transducer being performed under at least two ultrasonic output conditions. As a result, an ultrasonic cleaning method is provided that resolves the problem of uneven cleaning (missed spots), which has been a problem with ultrasonic cleaning, and that can effectively eliminate particles.</p>
申请公布号 WO2011089673(A1) 申请公布日期 2011.07.28
申请号 WO2010JP07274 申请日期 2010.12.15
申请人 SHIN-ETSU HANDOTAI CO.,LTD.;KABASAWA, HITOSHI;ABE, TATSUO 发明人 KABASAWA, HITOSHI;ABE, TATSUO
分类号 H01L21/304;B08B3/12 主分类号 H01L21/304
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