INSPECTION DEVICE FOR OPTICAL WAVEGUIDE

摘要

PROBLEM TO BE SOLVED: To provide an inspection device for an optical waveguide capable of performing continuity inspection even for an optical waveguide which has a short waveguide length like an optical waveguide on an optical integrated circuit and is difficult to be inspected by a conventional optical fiber alignment device.

SOLUTION: The inspection device for the optical waveguide includes: a holding means for holding an object to be inspected; a light source for forming input light for being emitted to the optical inputting part of the optical waveguide; a first optical fiber that emits light by guiding the input light made incident from the light source; an inspection optical system comprising a telecentric first optical system that parallelizes the input light made incident from the first optical fiber, a telecentric second optical system that converges the input light parallelized by the first optical system to irradiate the optical inputting part of the optical waveguide with it and that parallelizes the output light emitted from the optical outputting part of the optical waveguide, and a first optical path changing means that changes all or part of the optical path of the input light so that the parallel light emitted from the first optical system is made incident on the second optical system; and a photodetecting means for detecting the output light parallelized by the second optical system.

COPYRIGHT: (C)2011,JPO&INPIT