发明名称 LIQUID MIXTURE SUPPLY DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a liquid mixture supply device which prevents drying from an overflow line in a tank in which a liquid mixture (slurry) is stored, and prevents the cohesion of abrasive grains in the tank. SOLUTION: The liquid mixture supply device includes a supply tank storing the liquid mixture supplied to a machining device, a first liquid mixture supply path for supplying the liquid mixture stored in the supply tank to the machining device, a supply tank overflow path abolishing the liquid mixture when the liquid mixture stored in the supply tank increases over specified amount, and a water sealing means arranged in the tank overflow path. The water sealing means a water sealing box formed with an inflow hole into which the liquid mixture overflowing from the supply tank flows on an upper wall, a water sealing cylinder discharging the liquid mixture in the water sealing box, and a water sealing lid covering the upper end of the water sealing cylinder. A liquid supplying path introducing liquid which does not include abrasives into the liquid mixture collected in the water sealing box is connected to the water sealing box. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011143508(A) 申请公布日期 2011.07.28
申请号 JP20100006148 申请日期 2010.01.14
申请人 DISCO ABRASIVE SYST LTD 发明人 MAEJIMA MAKOTO
分类号 B24B57/02;B24B37/00;H01L21/304 主分类号 B24B57/02
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