| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for regulating specific resistance of ultrapure water and an apparatus for treating the ultrapure water capable of more quickly and simply stabilizing the specific resistance of the ultrapure water at a desired value than ever before even when the flow rate of the ultrapure water fluctuates. SOLUTION: In the method for regulating the specific resistance of the ultrapure water using the apparatus for treating the ultrapure water preferable for the method, the flow rate of the ultrapure water is measured while carbon dioxide gas is dissolved into the ultrapure water. When the variation of the flow rate the ultrapure water is more than a prescribed value, the ultrapure water is supplied with the carbon dioxide gas the amount of which is determined on the basis of the data inputted in advance as to the correlation among the flow rate of the ultrapure water, the amount of the carbon dioxide gas, and the specific resistance value. After a prescribed time has passed, a feed back control is carried out on the basis of the measured value with the specific resistance meter so that the specific resistance is to be constant within the range of 0.2 to 1.0 MΩcm. COPYRIGHT: (C)2011,JPO&INPIT |
