THIN FILM DEPOSITION DEVICE, METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE USING THE SAME, AND ORGANIC LIGHT-EMITTING DISPLAY DEVICE MANUFACTURED BY THE SAME METHOD

摘要

PROBLEM TO BE SOLVED: To provide a thin film deposition device which can be easily applied to a mass production process of a large substrate and can improve yields, and provide a method of manufacturing an organic light-emitting display device using the same, and the organic light-emitting display device manufactured by the same method.

SOLUTION: The thin film deposition device includes: a deposition source for radiating deposition material; a deposition source nozzle part arranged on one side of the deposition source and having a plurality of deposition source nozzles formed along a first direction; a patterning slit sheet arranged opposite to the deposition source nozzle part, having a plurality of patterning slits formed along the first direction, wherein lengths of the plurality of patterning slits are different from each other; and an interruption plate assembly arranged between the deposition source nozzle part and the patterning slit sheet along the first direction and including a plurality of interruption plates for partitioning a space between the deposition source nozzle part and the patterning slit sheet into a plurality of deposition spaces. The thin film deposition device is formed separately from a substrate by a predetermined distance. The thin film deposition device and the substrate are so formed that the one is relatively movable with respect to the other.

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