UNIT PIXEL INCLUDING PHOTON-REFRACTING MICROLENS, BACK-SIDE ILLUMINATION CMOS IMAGE SENSOR INCLUDING THE SAME, AND METHOD OF FORMING THE UNIT PIXEL

摘要

PROBLEM TO BE SOLVED: To provide a unit pixel including a photon-refracting microlens for refracting a photon which is entered, passes through a photodiode, is thereafter reflected from a metal layer and returns to the photodiode again to a center of the photodiode; a back-side illumination CMOS image sensor including the same; and a method for forming the unit pixel.

SOLUTION: This unit pixel including a photon-refracting microlens includes a photodiode, a metal layer, and a photo-refracting microlens. The photon-refracting microlens is disposed between the photodiode and the metal layer, and refracts photons reflected from the metal layer to a center of the photodiode.

COPYRIGHT: (C)2011,JPO&INPIT